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SitemapAn ID Tag (Data Carrier) is mounted to the pod containing reticles, making it easy to check and manage the reticles inside.
Know-How
By attaching an ID Tag to the pod, each pod and the information on the reticles that it contains can be managed.
Benefit / Efficiency
The reticles stored inside the pod can be checked and identified by reading the information in the ID Tag mounted to the pod. This means that data exchange via communications between the stepper and the stocker is unnecessary, and allows effective control with a relatively simple system. Physical objects (the pods) and information (reticle IDs) can be handled together, so there are no racking errors.
Application No.210
Applicable Product
RFID System (Conforms to SEMI standard, Electromagnetic Inductive 134 kHz)
V640 Series
Enables reading and writing transponders for various Semiconductor applications, such as FOUPs (Front-Opening Unified Pods), reticles, and pods.
Other Applications
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