Reticle Control

By attaching an ID Tag to the pod, each pod and the information on the reticles that it contains can be managed.

The reticles stored inside the pod can be checked and identified by reading the information in the ID Tag mounted to the pod. This means that data exchange via communications between the stepper and the stocker is unnecessary, and allows effective control with a relatively simple system. Physical objects (the pods) and information (reticle IDs) can be handled together, so there are no racking errors.

Application No.210

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