Production Process for 300-mm Semiconductor Wafers

Mount an ID Tag (a FOUP Carrier ID) and store work instructions and information (e.g., model information, process instructions, process completion information, lot information, and inspection results) in the ID Tag. Dispersed control can then be applied to the necessary information.

Know-How

Mount an ID Tag to the FOUP Carrier to manage FOUP information.

Benefit / Efficiency

Unlike production control systems that use bar codes, repeated exchanges with the host are not necessary. This makes for a simpler production program and system. The read/write reliability is high and so problems such as line stoppages due to errors can be avoided. Replacing bar code labels and other similar kinds of maintenance are not required, enabling reductions in running costs. A system conforming to SECS I/II (SEMI E4 and E5) can be configured using the V700-L22. Compliance with SEMI E15.1 makes it easy to mount it to load ports.

Application No.211

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