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SitemapRFID System (Conforms to SEMI standard, Electromagnetic Inductive 134 kHz)
V640 Series
Enables reading and writing transponders for various Semiconductor applications, such as FOUPs (Front-Opening Unified Pods), reticles, and pods.
Data Sheet (324KB)
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Application No.210
Reticle Control
An ID Tag (Data Carrier) is mounted to the pod containing reticles, making it easy to check and manage the reticles inside.
Application No.211
Production Process for 300-mm Semiconductor Wafers
Mount an ID Tag (a FOUP Carrier ID) and store work instructions and information (e.g., model information, process instructions, process completion information, lot information, and inspection results) in the ID Tag. Dispersed control can then be applied to the necessary information.
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