ZS-HL

Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements

Range of models with measuring center distance of 20 to 1,500 mm.

Achieves maximum resolution of 0.02 μm (0.001 μm).

Maximum response speed of 110 μs.

Parallel output supported.

Extreme Stability

Ideal Size and Stability
Head Size

Complete sensing stability with optimum Sensor Head size for best performance and holding mechanism secured at 3 points. (See note.)

Superior Moving Resolution
Increased Lens Resolution

Moving resolution (error based on workpiece surface position) has been reduced dramatically by optimizing the optical system with increased sensitivity and resolution of the light receiving lenses.

Reduced Error for Different Materials
2D CMOS

With a CCD, the charge overflows to the next pixel when excessive light is received. This phenomenon does not occur with CMOS, so there are no effects from light fluctuations from different materials or excessive light reception.

ZS-HLDS5T/HLDS10
Detect Essentially Any Object

Reduced Variation in Linearity between Different Objects, and Linearity Determines Measurement Accuracy.
Makes it easier to introduce a variety of detection objects.

Linearity Characteristic

ZS-HLDS60/HLDS150
A Long Range That Handles Essentially Any Installation Site

First 1,500 mm long range sensing in the industry enables measurement of previously impossible points.

Simple Long-distance Step Measurement

Note:This function may not be applicable in bright surrounds.

ZS-HLDS2VT
Ideal for Measuring the Height and Thickness of Transparent Objects

Tilted and moving workpieces can also be stably measured.

A special aspherical lens was developed for the ZS-HLDS2VT, and the design of the optical structure was optimized for regular-reflective workpieces. This has greatly increased the allowable degree of tilt and improved stability for measuring transparent and regularreflective workpieces.

Angle Characteristics

ZS-HLDS2T/ZS-LD10GT/LD15GT
The Only Way to Very High-precision Measurements

Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision

Simultaneous Measuring of Touch Panel Film Thickness and Gap

An unbelievable stationary measurement precision of 0.25 μm, the highest in this product class.

Height Control of Sealant Dispensers

Inspection of Disk Play on HDD Motor Rotating Plate