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SitemapAir Particle Sensor
ZN-PD
Air Particle Sensor for In-line Measurement (Smallest in the Industry)
Data Sheet (5057KB)
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Application No.165
Air Particle Sensor Constantly Monitors Particles Inside Clean Rooms
The use of a high-performance fan for pulling in outside air enables 40,000 hours of constant measurement.
Application No.166
Achieves Clean Conditions for CCD and CMOS Mounting Processes
The Air-cleaning Unit and Air Particle Sensor provide integrated cleaning of the work area and equipment inside Clean Rooms.
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