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RFIDs for Reticle Management

Case Number 210

last update: April 19, 2011

RFID Tags (IC tags) that are attached to pods that hold reticles simplify the confirmation and management of internal reticles.


RFID Tags (IC tags) that are attached to pods manage individual pod information and internal reticle information.

Benefit / Efficiency

The internal reticle is checked and identified with the information in the RFID Tag (IC tag) that is attached to the pod. This eliminates the need for communications between stepper and stocker, which simplifies the management system.

Physical objects (the pods) and information (reticle IDs) can be handled together, so there are no racking errors.

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