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RFIDs Used to Manage Wafer Manufacturing Process

Case Number 211

last update: April 19, 2011

RFID Tags (IC tags) that are attached to the 300-mm wafer transport FOUP store work instructions. They store model information, process instructions, process completion information, lot information and inspection results. The necessary information is read from RFID Tags (IC tags) when required.


The RFID Tag (IC tag) that is attached to the FOUP is used to manage FOUP information.

Benefit / Efficiency

There is no need for interaction between bar codes and administration computers in each instance, and this simplifies the production program and system.

They provide highly reliable reading and writing, which eliminates line stoppages caused by errors.

RFID Tags (IC tags) uses non-contact communications and so there are no particles or other matter generated, contributing to a higher yield rate.

Replacing bar code labels and other similar kinds of maintenance are not required, enabling reductions in running costs.

Use Products