RFIDs Used to Manage Wafer Manufacturing Process
Case Number 323
last update: April 18, 2011
Production information is added to RFID Tags (IC tags) that are installed in wafer trays to perform process management.
RFID Tags (IC tags) that are attached to trays are used to manage different wafers and processing for different customers.
Information and manufacturing instructions for each customer and process are written to RFID Tags (IC tags), and information is read by Antennas that are installed in each process.
Information for each customer and process is added to RFID Tags (IC tags) to enable management of wafers by customer and instructions by process.
Benefit / Efficiency
The input errors and careless mistakes that occur in handwriting and terminal input are reduced.
Management is made paperless.
RFID Systems with ISO/IEC 18000-3 (15693) Compliance