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RFIDs Used to Manage Wafer Manufacturing Process

Case Number 323

last update: April 18, 2011

Production information is added to RFID Tags (IC tags) that are installed in wafer trays to perform process management.

RFID Tags (IC tags) that are attached to trays are used to manage different wafers and processing for different customers.
Information and manufacturing instructions for each customer and process are written to RFID Tags (IC tags), and information is read by Antennas that are installed in each process.

Know-How

Information for each customer and process is added to RFID Tags (IC tags) to enable management of wafers by customer and instructions by process.

Benefit / Efficiency

The input errors and careless mistakes that occur in handwriting and terminal input are reduced.

Management is made paperless.

Use Products

V680 series RFID System V680 series

RFID Systems with ISO/IEC 18000-3 (15693) Compliance