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Detects Wafers at Temperatures Up To 350°C

Case Number 37

last update: April 13, 2015

This application uses a Heat-resistant Through-beam Fiber Sensor that can withstand up to 350°C. 


This Sensor ensures stable detection of wafers that are baked at a high temperature.

Know-How

Heat-resistant fiber sensor that could be used in an oven at 350°C were not available. Therefore, two fiber sensors were used, one before and one after the oven.

Benefit / Efficiency

This application uses a 350°C heat-resistant Fiber Sensor, which enables detecting the passage of wafers with a set of Fiber Sensors in a heated oven.



Applied Models

E32-T61-S + E3NX-FA

Use Products

E32 Series Fiber Sensors E32 Series

OMRON's Fiber Sensors continue to support an increasing range of applications.