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Detects Wafers in Vacuum Conveyance Systems

Case Number 45

last update: October 27, 2009

This application uses a Vacuum Fiber Sensor that can be used under a high vacuum.
This Sensor can be used under a 10-5Pa vacuum. The Sensor has 1-channel and 4-channel flange system that you can combine according to the number of Sensors.

Know-How

Sensors that could be used in a vacuum chamber were not available, which prevented you from detecting the presence of wafers.

Benefit / Efficiency

A Fiber Sensor that can be used in a vacuum chamber enables detecting the presence of wafers even in a 10-5Pa vacuum environment.



Applied Models

E32-V + E3X-DA-S

Use Products

E32 Series Fiber Sensors E32 Series

OMRON's Fiber Sensors continue to support an increasing range of applications.