Detects Wafers in Vacuum Conveyance Systems
Case Number 45
last update: April 13, 2015
This application uses a Vacuum Fiber Sensor that can be used under a high vacuum.
This Sensor can be used under a 10-5Pa vacuum. The Sensor has 1-channel and 4-channel flange system that you can combine according to the number of Sensors.
Sensors that could be used in a vacuum chamber were not available, which prevented you from detecting the presence of wafers.
Benefit / Efficiency
A Fiber Sensor that can be used in a vacuum chamber enables detecting the presence of wafers even in a 10-5Pa vacuum environment.
E32-V + E3NX-FA
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