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Detects Wafers in Chemical Washing Tanks

Case Number 47

last update: November 6, 2009

This application uses a Capacitive Proximity Sensor with a fluororesin body for excellent resistance to chemicals and oils.
This Capacitive Proximity Sensor can detect passage of wafers in a chemical washing process. Its all-fluororesin casing ensures excellent resistance to chemicals and oils. It also has a sensitivity adjuster to change the detection distance according to the workpiece.

Know-How

Conventional sensors could fail due to the adverse effects of sprayed chemicals. Also, fluororesin optical sensors could not provide stable detection due to the effects of residual chemicals or drops of cleaning water.

Benefit / Efficiency

The use of a fluororesin body ensures excellent resistance to chemicals and oils. You can install the Sensor in essentially any environment.

A Capacitive Sensor can detect both silicon and glass wafers.

Use Products

E2KQ-X Chemical-resistant Proximity Sensor E2KQ-X

Fluororesin-coated Capacitive Sensor with Sensitivity Adjuster