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Detects Glass Substrates in Vacuum Chambers

Case Number 48

last update: November 4, 2009

This application uses a Photoelectric Sensor to detect transparent objects, including glass wafers.Through a view port, this Sensor can detect glass wafers that travel in a vacuum chamber. We used optical and circuit technology that detect minute signal differences of transparent glass.


Conventional retroreflective photoelectric sensors could not provide stable detection of transparent glass with minute light attenuation.

Benefit / Efficiency

Our optimized optical and circuit technology provides stable detection of transparent glass.

Use Products

E3S-R Transparent Object Detection Sensor E3S-R

Ideal for Detecting Glass Wafers and Other Transparent Objects