Detects Notches and Eccentricity of Wafers
Case Number 91
last update: April 13, 2015
This application uses a Side-view Fiber Sensor with a homogenous area beam.
This Sensor uses a change in the amount of interrupted lights caused by notches and eccentricity to enable detecting the position of notches and eccentricity of wafers. The amount of interrupted light by wafers is proportional in the 11-mm-wide detection area. The special optical components enable homogenous area beams in the detection area.
Conventional area sensors did not have homogeneous area beams, which prevented accurate detection of the notches and eccentricity of wafers.
Benefit / Efficiency
The use of a Twin-output Amplifier with a homogenous area beam enables simultaneous detection of notches and eccentricity of wafers.
E32-T16JR + E3NX-FA
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