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EE-SPY801 / 802

Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Caution: All units are in millimeters unless otherwise indicated.

Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified.

Sensors

EE-SPY801

EE-SPY801 / 802 Dimensions 3

EE-SPY802

EE-SPY801 / 802 Dimensions 4

Accessories (Order Separately)

Pedestal
EE9-C01

EE-SPY801 / 802 Dimensions 6

Pedestal
EE9-C02

EE-SPY801 / 802 Dimensions 7