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Safety Components

System of Standards for Machinery Safety and Situation by Country of Safety Requirements

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Primary Contents

Safety Requirements

1.System of Standards for Machinery Safety

The International Electrotechnical Commission (IEC) prepares international standards for all electrical, electric and related technologies, and the International Organization for Standardization (ISO) prepare international standards for all technologies other than electrical and electric technologies (machinery and management). European countries often take the initiative in proposing the standards and establishing them as ISO/IEC international standards.

Accelerated Globalization

1.Europe's EN Standards are produced by CEN/CENELEC.

2.IEC/ISO international standards are implemented without duplicating the efforts of various agreements.

3.Member countries of the WTO/TBT Agreements shall ensure the adoption of international standards as own national standards.

International Standards and Design of Machines and Devices

2.Situation by Country

(1) Europe

● EC Directives and the Machinery Directive

There are approximately 300 EC Directives issued for harmony in Europe. The EC Directives are equivalent to law in 18 countries in Europe. The EC Directive for machinery is called the Machinery Directive. The Machinery Directive (EC Directive 98/37/EC) restricts the export to Europe of machinery without the CE Marking as of January 1, 1995.
The Machinery Directive requires that machinery satisfy the three pillars of safety: mechanical safety, electrical safety, and worker safety. Specifically, among other regulations, EN 292 must be satisfied for machinery, EN 60204-1 and IEC 60204-1 for electrical systems, and VBG for accident prevention.
The new directive (2006/42/EC) was issued June 9, 2006. It will be implemented from December 29, 2009.

● Low-voltage Directive (LVD)

According to the EC Directive (EC Directive 2006/95/EC), low voltage devices are devices that operate at 50 to 1,000 VAC or 75 to 1,500 VDC. The LVD applies to almost all electrical devices from electrical household appliances and office equipment to industrial electrical machinery. The LVD pertains to electrical safety in the Machinery Directive, along with the EMC Directive.

● EMC Directive

The EC Directive for EMC devices is called the EMC Directive (EC Directive 89/336/EEC and New EMC Directive 2004/108/EC are effective.). EMC stands for "electromagnetic compatibility." When measures have been taken for both electromagnetic interference (EMI) and electromagnetic susceptibility/immunity (EMS), the device is called electromagnetically compatible, which means that EMC measures have been successfully applied.

● CE Marking

The CE Marking is a mark of compliance with the EC Directives. The CE Marking indicates that the product complies with the stipulated level of protection in all relevant EC Directives. Devices labeled with the CE Marking may be imported and exported to Europe without restriction. You might call the CE Marking a “passport” to Europe.

● Relation between the EC Directives, EN Standards, and CE Marking.

As explained above, all relevant EC Directives must be satisfied for a product to be labeled with the CE Marking. EN Standards complement the EC Directives. Satisfying the EN Standards alone, however, does not result in the EC Directives being satisfied. Countermeasures for product liability is mainly required in manuals and catalogs.

● Essential Safety Requirements

These basic requirements are listed in Machinery Directive Appendix I. The Preliminary Observations of the Annex I of Machinery Directive are introduced below.

1.The obligations laid down by the essential health and safety requirements apply only when the corresponding hazard exists for the machinery in question when it is used under the conditions foreseen by the manufacturer. In any event, requirements 1.1.2, 1.7.3 and 1.7.4 apply to all machinery covered by this directive.

2.The essential health and safety requirements laid down in this Directive are mandatory. However, taking into account the state of the art, it may not be possible to meet the objectives set by them. In this case, the machinery must as far as possible be designed and constructed with the purpose of approaching those objectives.

3.The essential health and safety requirements have been grouped according to the hazards which they cover. Machinery presents a series of hazards which maybe indicated under more than one heading in this Annex. The manufacturer is under an obligation to assess the hazards in order to identify all of those which apply to his machine; he must then design and construct it taking account of this assessment.

● European Harmonized Standards

Standards for countries in the European region are unified by CEN and CENELEC. The unified standards are called European Norm (EN) and "EN" is added to the front of the standard numbers. When new EN Standards are established, each country in the region must replace its relevant domestic standard with the EN Standard normally within six months. Applicable standards for products intended are not indicated in the EC Directives. The EN Standards that must apply are published separately in the Official Journal of the European Communities (OJEC). Manufacturers are therefore necessary to determine the design specifications based on the EN Standards published in the OJEC. In addition to official EN Standards, Drafts of European Standards (prEN), Harmonization Documents (HD), European Pre-standards (ENV), and CEN Reports (CR) are also published.

● Product Liability

The General Product Safety Directive and Product Liability Directive are complementary regulations but their scope is not identical. The Product Liability Directive applies to virtually all products, while the General Product Safety Directive applies only to new, used, and reconditioned products intended for or used by consumers. Both regulations, however, include areas of uncertainty. Therefore, to be especially careful, a manufacturer must compare the individual provisions of all directives that apply to its product.

Structure of Standards Related to Machinery Safety

Main EC Directives (As of January 2008)

Directive No.EC Directive Name
2006/95/ECLow Voltage devices
2004/108/ECElectromagnetic compatibility (EMC)
87/404/EECSimple pressure vessels
94/9/ECEquipment intended for use in Potentially Explosive Atmospheres (ATEX)
97/23/ECPressure Equipment
89/686/EECPersonal Protective Equipment
99/5/ECRadio and Telecommunications Terminal Equipment (R&TTE)
2004/22/EECMeasuring instruments
90/396/EECAppliances burning gaseous fuels
00/9/ECCableway installations designed to carry persons
89/106/EECConstruction products
93/15/EECExplosive for Civil uses
90/385/EECMedical devices: Active implantable
93/42/EECMedical devices: General
98/79/ECMedical devices: In vitro diagnostic
92/42/EECHot-water boilers (efficiency requirement)
90/384/EECNon-automatic weighing instruments
94/62/ECPackaging and packaging waste
94/25/ECRecreational craft (boats)

Example of compliance evaluation based on machinery directive (98/31/EC)

Machine requiring EC type testing by an EC accredited facility (Machines equivalent to the Machinery Directive Addendum IV A, and B)

(Machines to which the machinery directive applies are machines and safety components)

(A) Machines

(1)Circular saw machines for cutting wood materials and meat (Single blades/multi-blade)

(2)Hand-fed surface planing machines for woodworking

(3)Thicknessers for one-side dressing with manual loading and/or unloading for woodworking

(4)Band saw machines for cutting wood materials and meat

(5)Combined machines of the types referred to in (1) to (4) and (7)

(6)Tenoning machines

(7)Hand-fed vertical spindle moulding machines for working with wood and analogous materials.

(8)Portable chainsaws

(9)Presses (Have a travel exceeding 6 mm and a speed exceeding 30 mm/s)

(10)Injection or compression plastics-moulding machines

(11)Injection or compression rubber-moulding machines

(12)Machines for underground working

(13)Manually-loaded trucks for the collection of household refuse incorporating a compression mechanism


(15)Vehicles servicing lifts

(16)Devices for the lifting of persons involving a risk of falling from a vertical height of more than three meters

(17)Machines for the manufacture of pyrotechnics

(B) Safety components

(1)Electro-sensitive devices designed specifically to detect persons in order to ensure their (non-material barriers, sensor mats, electromagnetic detectors, etc.)

(2)Logic units which ensure the safety functions of bimanual controls

(3)Automatic movable screens to protect the presses referred to in (9), (10) and (11) of (A)

(4)Roll-over protection structures (ROPS)

(5)Falling-object protective structures (FOPS)

Note:New machinery directives are scheduled to be enacted in 2009. Therefore, there is the possibility that this flowchart will also be changed to reflect the new directives.

(2) The United States of America

● Occupational Safety and Health Administration (OSHA)

The Occupational Safety and Health Act (OSHA) passed in 1970 to provide safe and healthy working conditions. Part 1910 of the 29th Code of Federal Regulations (CFR) gives specific standards. Subpart O of Part 1910 sets standards for machinery and machine guarding, and divides into Part1910.211 to Part 1910.219.

1910.212General requirements for all machines
1910.213Woodworking machinery requirements
1910.214Cooperage machinery
1910.215Abrasive wheel machinery
1910.216Mills and calenders in the rubber and plastic industries
1910.217Mechanical power presses
1910.218Forging machines
1910.219Mechanical power-transmission apparatus

Part1910.212 covers general requirements for all machines. The main points in Part1910.212 are given below.

Paragraph (a)(1)

One or more methods of machine guarding shall be provided to protect the operator and other employees in the machine area from hazards such as those created by point of operation, ingoing nip points, rotating parts, flying chips, and sparks. Examples of guarding methods are barrier guards, two-hand tripping devices, electronic safety devices, etc.

Paragraph (a)(3)(ii)

The point of operation of machines whose operation exposes an employee to injury shall be guarded.The guarding device shall be in conformity with any appropriate standards, therefore, or, in the absence of applicable specific standards, shall be so designed and constructed as to prevent the operator from having any part of his body in the danger zone during the operating cycle.

● American National Standards Institute (ANSI)

ANSI is an independent standards organization in the USA. It does not create any standards by itself, but rather approves and registers US standards created in various fields. For example, in 1976 ANSI approved the Underwriters Laboratories (UL), which was established by the fire insurance industry. Manufacturers of industrial robots in Japan and many other countries worldwide use the requirements for safety of industrial robots and robotic systems given in ANSI/RIA R15.06, which forms the basis of ISO 10218. ANSI/B11.19 safety standards for machine tools were established in 2003 and have become important standards.

1. Safety of Machine Tools

The American Society of Mechanical Engineers (ASME) collaborates in creating ANSI Standards, which are often adopted as ANSI B Standards. The main safety standards for machine tools are stipulated by ANSI B11.

US Standards (B11 Standards)

ANSI B11.1Mechanical power presses
ANSI B11.2Hydraulic power presses
ANSI B11.3Power press brakes
ANSI B11.4Shears
ANSI B11.5Iron workers
ANSI B11.6Lathes
ANSI B11.7Cold headers and cold formers
ANSI B11.8Drilling, milling, and boring machines
ANSI B11.9Grinding machines
ANSI B11.10Metal sawing machines
ANSI B11.11Gear-cutting machines
ANSI B11.12Roll forming and roll bending machines
ANSI B11.13Automatic bar and chucking machines
ANSI B11.14Coil slitting machines
ANSI B11.15Pipe tube and shape bending machines
ANSI B11.16Metal powder compacting presses
ANSI B11.17Horizontal hydraulic extrusion presses
ANSI B11.18Machinery and machine systems for processing of coiled strips, sheets, and plates
ANSI B11.19Performance criteria for the design, construction, care, and operation of safeguarding
ANSI B11.20Integrated manufacturing systems/cells

ANSI B11.19 (Safeguarding when Referenced by the Other B11 Machine Tool Safety Standards - Performance Criteria for the Design, Construction, Care, and Operation) sets standards for barrier guards often referenced by other ANSI B11 standards. The main points in B11.19 are given on the next paragraph.

Purposes for Using Safety Equipment

To ensure the safety of operators, safety and protective equipment is designed to prevent any hazardous machine motion or stop the machine when the operator's hand or other body part enters the hazard zone. The following items are demanded of safety and protective equipment.

1. Interlocked Protective Device

A protective barrier must be installed that is equipped with an interlock function that prevents the machine from operating unless the hazard is eliminated.

Safety related systems must be provided with a safety function that prevents the machine from starting due to a single failure.

Interlock equipment must be equipped with a tamper resistant function.

2. Presence-sensing Device

A device equipped with a function that detects the operator's hand or other body part, and outputs a signal to prevent any hazardous machine motion or to stop the machine.

The device must have a single failure detection function.

When mounted in a location that requires adjustment of the operating conditions, a blanking function must be provided.

3. Safety Mat

The Safety Mat is a device that detects the presence of an operator who steps on it, and prevents any hazardous machine motion.

The device must have a single failure detection function.

2. Safety of Industrial Robots

Safety items demanded of industrial robots by U.S. standards (ANSI/RIA R15.06)Applicable scope (Section 1)

Robot here refers to industrial robots and industrial robot systems.

Date of ANSI standard implementationThe standard has been implemented for industrial robots since June 2001.
The standard has been implemented for industrial robot systems since June 2002.

Robot production, modification, re-assembly (Section 4)

Electromagnetic compatibility (EMC) countermeasures for electrical devices

Safety circuit designs (according to risk reduction category)

Emergency stop buttons shall be shaped to fit the palm of the hand, or mushroom shaped, and shall be red on a yellow background.

Enabling devices
3-position switches

Safety and protective device performance (Section 5)

Safety and protective devices
Light Curtains, Safety Mats, two-handed operating devices

Installation of robot and robot systems (Section 6)

Software or devices that are to be used with safety devices must be approved by an NRTL (U.S. Nationally Recognized Testing Laboratory).

Safeguarding of personnel (Sections 7, 8, 9, 10)

Requirements for reducing risk due to risk assessment
Requirements for robot risk reduction and design according to safety categories R1, R2 (A, B, C), R3 (A, B), and R4. (These risk reduction categories differ from those of the ISO13849-1 international standards.)

Safeguarding devices (Section 11)

mplementation methods according to Safety and protective devices (Section 5).

Maintenance of robot and robot systems (Section 12)

Establishing continuous safe operation programs

Testing and start-up of robot and robot systems (Section 13)

Testing and start-up procedures

Safety training of personnel (Section 14)

Training programs

Appendix (A to E)

B Safety distances and direct circuit-opening mechanism switches

C Risk assessment

OMRON safety components can be used when constructing safety-related systems conforming with the requirements of ANSI B11.19 and ANSI/RIA R15.06.

(3) Japan

● Industrial Safety and Health Act

The amended Industrial Safety and Health Act went into effect in 2006, with the purpose of providing an environment for the promotion of independent safety and health activities in offices. For example, the Act includes requirements to investigate dangers and hazards in the workplace and take necessary measures against them. The Act incorporates a framework to identify dangers and hazards, evaluate risks, and implement measures to reduce these risks.

● Guidelines for Comprehensive Machinery Safety Standards

In July 2007, the Ministry of Health, Labor and Welfare in Japan amended its Guidelines for Comprehensive Standards of Machinery, which was originally issued in June 2001 in response to the basic safety standards provided in ISO 12100. These Guidelines stipulate the procedure for manufacturers to use in reducing safety risks and achieve designs that take safety into consideration in the manufacture of production equipment and machinery, and also request that users provide safety measures when they introduce and use the equipment and machinery.
In other words, the measures that ensure safety in machinery include measures that manufacturers build-in at the design stage and measures that users must take when using the machinery. However, the Guidelines also clarify the fact that the measures that manufacturers build-in at the design stage must naturally precede the measures taken by the users.
The following diagram shows the flow of achieving machinery safety based on the information in the Guidelines for Comprehensive Machinery Safety Standards.

Safety Procedure for Machinery

*1.In the Attachment, "risk assessment" is referred to as "assessment of hazards and dangers".

*2.In the Attachment, "hazards" is referred to as "hazards and dangers".


The regulations and standards of individual countries must be brought in line with international standards to remove trade barriers and thus ensure free trade worldwide. To that end, Japan accepted the terms of the World Trade Organization (WTO), becoming a member and signatory to the WTO Agreement as well as the TBT Agreement (Technical Barrier Treatment). In 1995, Japan declared its commitment to a system of global cooperation. Growing pressure to adopt international standards triggered a complete overhaul of the JIS standards, which were enacted under the Industrial Standardization Law, to bring them in line with the framework of the international IEC and ISO standards.The new JIS standards will be shifted to the hierarchical system comprised of type A (basic safety standards), type B (generic safety standards) and type C (machine safety standards) standards so that Japanese standards will conform to international standards.

JIS StandardsInternational
JIS B 9700-1: 2004Safety of machinery -- Basic concepts, general principles for design - Part 1: Basic terminology,
ISO12100-1: 2003
JIS B 9700-2: 2004Safety of machinery -- Basic concepts, general principles for design - Part 2: Technical principlesISO12100-2: 2003
JIS B 9702: 2000Safety of machinery -- Principles of risk assessmentISO14121: 1999
JIS B 9703: 2000Safety of machinery -- Emergency stop -- Principles for designISO13850: 1996
JIS B 9705-1: 2000Safety of machinery -- Safety-related parts of control systems - Part 1: General principles for
ISO13849-1: 1999
JIS B 9707: 2002Safety of machinery -- Safety distances to prevent danger zones being reached by the upper
ISO13852: 1996
JIS B 9708: 2002Safety of machinery -- Safety distances to prevent danger zones being reached by the lower
ISO13853: 1998
JIS B 9709-1: 2001Safety of machinery -- Reduction of risks to health from hazardous substances emitted by
machinery - Part 1: Principles and specifications for machinery manufacturers
ISO14123-1: 1998
JIS B 9709-2: 2001Safety of machinery -- Reduction of risks to health from hazardous substances emitted by
machinery - Part 2: Methodology leading to verification procedures
ISO14123-2: 1998
JIS B 9710: 2006Safety of machinery -- Interlocking devices associated with guards -- Principles for design and
ISO14119: 1998
JIS B 9711: 2002Safety of machinery -- Minimum gaps to avoid crushing of parts of the human bodyISO13854: 1996
JIS B 9712: 2006Safety of machinery -- Two-hand control devices -- Functional aspects and design principlesISO13851: 2002
JIS B 9713-1: 2004Safety of machinery -- Permanent means of access to machinery - Part 1: Choice of a fixed
means of access between two levels
ISO14122-1: 2001
JIS B 9713-2: 2004Safety of machinery -- Permanent means of access to machinery - Part 2: Working platforms
and walkways
ISO14122-2: 2001
JIS B 9713-3: 2004Safety of machinery -- Permanent means of access to machinery - Part 3: Stairs, stepladders
and guard-rails
ISO14122-3: 2001
JIS B 9713-4: 2004Safety of machinery -- Permanent means of access to machinery - Part 4: Fixed laddersISO14122-4: 2004
JIS B 9714: 2006Safety of machinery -- Prevention of unexpected start-upISO14118: 2000
JIS B 9715: 2006Safety of machinery -- Positioning of protective equipment with respect the approach of parts
of the human body
ISO13855: 2002
JIS B 9716: 2006Safety of machinery -- Guards -- General requirements for the design and construction of
fixed and movable guards
ISO14120: 2002
JIS B 9960-1: 1999Safety of machinery -- Electrical equipment of machines - Part 1: General requirementsIEC60204-1: 1997
JIS B 9704-1: 2004Safety of machinery -- Electro-sensitive protective equipment - Part 1: General requirements
and tests
IEC61496-1: 2004
JIS B 9704-2: 2000Safety of machinery -- Electro-sensitive protective equipment - Part 2: Particular requirements
for equipment using active opto-electronic protective devices (AOPDs)
IEC61496-2: 1997
JIS B 9704-3: 2004Safety of machinery -- Electro-sensitive protective equipment - Part 3: Particular requirements
for Active Opto-electronic Protective Devices responsive to Diffuse Reflection (AOPDDR)
IEC61496-3: 2001
JIS B 9706-1: 2001Safety of machinery -- Indication, marking and actuation - Part 1: Requirements for visual,
auditory and tactile signals
IEC61310-1: 1995
JIS B 9706-2: 2001Safety of machinery -- Indication, marking and actuation - Part 2: Requirements for markingIEC61310-2: 1995
JIS B 9706-3: 2001Safety of machinery -- Indication, marking and actuation - Part 3: Requirements for the location
and operation of actuators
IEC61310-3: 1999
JIS C 0508-1: 1999Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 1: General requirements
IEC61508-1: 1998
JIS C 0508-2: 2000Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 2: Requirements for electrical/electronic/programmable electronic safety-related systems
IEC61508-2: 2000
JIS C 0508-3: 2000Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 3: Software requirements
IEC61508-3: 1998
JIS C 0508-4: 1999Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 4: Definitions and abbreviations
IEC61508-4: 1998
JIS C 0508-5: 1999Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 5: Examples of methods for the determination of safety integrity levels
IEC61508-5: 1998
JIS C 0508-6: 2000Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 6: Guidelines on the application of parts 2 and 3
IEC61508-6: 2000
JIS C 0508-7: 2000Functional safety of electrical/electronic/programmable electronic safety-related systems -
Part 7: Overview of techniques and measures
IEC61508-7: 2000

(As of August 2008)

(4) China

● GB

Chinese national standards (GB: Guojia Biaozhun)

Standards for electrical equipment are produced based on IEC

Structure of National Standards

GBMandatory National StandardsStandardization Administration of the People's Republic of China
GB/TVoluntary National StandardsStandardization Administration of the People's Republic of

Electric wires and cables
Electric circuit switches, electronic equipment for
protection or connection use

GBInternational Standards

Low-voltage electrical equipment

GBIEC Standards Number



CCC: China Compulsory Certification mark system

Upon its entry into the World Trade Organization (WTO) in 2001,
China integrated its former Certification System for Imported Items and Certification System for Items
Distributed within China, and issued the New Compulsory Certification System on December 3, 2001, which took effect on May 1, 2002.
On August 1, 2003 it became prohibited to import or sell products that were not certified under the new certification system. The first list of products to be subject to the New Compulsory Certification System consisted of 132 products in 19 groups.
These products were required to display the China Compulsory Certification (CCC) mark.

(5) South Korea

● KS

South Korea became a WTO member and signatory to the TBT Agreement (Technical Barrier Treatment) in 1995, the year the WTO was created, and declared its commitment to a system of global cooperation. As a result, the Korean Industrial standards (KS) were established by the Industrial Standardization Law as part of an overall obligation to employ international standards, and are in line with the framework of the international IEC and ISO standards.

● S-mark

The S-mark is a voluntary certification system established in November 1997 by the Korea Occupational Safety and Health Agency (KOSHA) to reduce the occurrence of work-related accidents. The S-mark is granted for products that have been examined by KOSHA and are deemed to satisfy standards based on the Industrial Safety Maintenance Law, Article 34, item 2, for product safety, product reliability, and the quality control capabilities of the manufacturer.
In the case of OMRON, "Safety Components" have been certified for both safety and EMC, and basic sensors have received EMC certification. For details of certified models refer to the Safety Components Series Catalog (Y106).

(6) Australia

● Australian Standards numbers

Machine standards are created based on ISO standards, and electrical standards are created based on IEC standards.

(7) International Standards Relationships

CountryJapanEuropeU.S.A.CanadaChinaSouth KoreaAustralia
National standards
ISO12100-1JIS B 9700-1EN ISO 12100-1ANSI/ISO 12100-1---GB/T 15706.1
-1995 * 1
KS B ISO 12100-1AS4024.1201
12100-2JIS B 9700-2EN ISO 12100-2ANSI/ISO 12100-2---GB/T 15706.2
-1995 * 1
KS B ISO 12100-2AS4024.1202
14121JIS B 9702EN ISO 14121------GB/T 16856
KS B ISO 14121AS4024.1301
13849-1JIS B 9705-1EN ISO 13894-1------GB/T 16855.1
KS B ISO 13849-1AS4024.1501
13850JIS B 9703EN 418------GB 16754
KS B ISO 13850AS4024.1604
13852JIS B 9707EN 294------GB 12265.1
KS B ISO 13852AS4024.1801
13853JIS B 9708EN 811------GB 12265.2
KS B ISO 13853AS4024.1802
13854JIS B 9711EN 349------GB 12265.3
KS B ISO 13854AS4024.1803
13855JIS B 9715EN 999---------KS B ISO 13855AS4024. 2
IEC60204-1JIS B 9960-1EN 60204-1------GB 5226.1
KS C IEC 60204-1AS60204.1
61496-1JIS B 9704-1EN 61496-1UL 61496-1CSA-E61496-1GB/T 19436.1
KS C IEC 61496-1AS4024.2
61310-1JIS B 9706-1EN 61310-1------GB 18209.1
KS C IEC 61310-1AS4024.1904
61310-2JIS B 9706-2EN 61310-2------GB 18209.2
KS C IEC 61310-2AS4024.1906
61310-3JIS B 9706-3EN 61310-3------GB 18209.3
KS C IEC 61310-3AS4024.1907
---CE-Mark *2UL *3CSA *3CCC *4S-Mark *5---

*1.ISO/TR 12100-1: 1992, ISO/TR 12100-2

*2.Self-declaration is allowed for general machines in the Machinery Directive.

*3.UL and CSA are mutual certification systems.

*4.As of April 2006. Certification is not required for the field of industrial machinery.

*5.S-mark certification requires Labor Department approval of safety certification regulations in addition to standards compliance.

(8) Industry Standards

● Semiconductor Manufacturing Equipment Guideline SEMI Standards

SEMI, which is an abbreviation of Semiconductor Equipment and Materials International, was established in 1970 as an international industry association for semiconductor manufacturing equipment and materials manufacturers. SEMI standards have been established as independent industry standards. There are separate standards for materials (M Series), Facilities (F Series), Flat Panel Displays (D Series), and Traceability (T Series), and the S Series governs environment, health and safety (EHS). These standards have been employed by many equipment users, primarily in the United States. Their headquarters are in California, and there are 11 offices in 8 countries around the world, including in Tokyo.

Structure of SEMI S Series

SEMI S1Safety guidelines for equipment safety labels
SEMI S2Environmental, health and safety guideline for semiconductor manufacturing equipment
SEMI S3Safety guidelines for process liquid heating system
SEMI S4Safety guideline for the separation of chemical cylinders contained in dispensing cabinets
SEMI S5Safety guideline for flow limiting devices
SEMI S6Environmental, safety and health guideline for exhaust ventilation of semiconductor manufacturing equipment
SEMI S7Safety guidelines for environmental, safety and health (ESH) evaluation of semiconductor manufacturing equipment
SEMI S8Safety guidelines for ergonomics engineering of semiconductor manufacturing equipment
SEMI S9Guide to electrical design verification tests for semiconductor manufacturing equipment that have been moved to SEMI S22
SEMI S10Safety Guideline for risk assessment and risk evaluation process
SEMI S11Environmental, health and safety guidelines in relation to semiconductor manufacturing equipment mini environments
SEMI S12Guidelines for equipment decontamination
SEMI S13Safety guidelines for operation and maintenance manuals for semiconductor manufacturing equipment
SEMI S14Safety guidelines for fire risk assessment and mitigation for semiconductor manufacturing equipment
SEMI S15Safety guideline for the evaluation of toxic and flammable gas detection systems
SEMI S16Guide for semiconductor manufacturing equipment design for reduction of environmental impact at end of life
SEMI S17Safety guideline for unmanned transport vehicle (UTV) systems
SEMI S18Environmental, health and safety guideline for silane family gases handling
SEMI S19Safety guideline for training of semiconductor manufacturing equipment installation, maintenance and service personnel
SEMI S20Safety guideline for identification and documentation of energy isolation devices for hazardous energy control
SEMI S21Safety guideline for worker protection
SEMI S22Safety guideline for the electrical design of semiconductor manufacturing equipment
SEMI S23Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment
SEMI S24Safety guideline for multi-employer work areas
SEMI S25Safety guideline for hydrogen peroxide storage and handling systems
SEMI S26Environmental, health and safety guideline for FPD manufacturing system

(As of August 2008)