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Detects Wafer Cassette Racks

Case Number 391

last update: March 7, 2011

Mounting a Slit and Adjustment Unit enable restricting the light for stable detection without detecting objects locating near that should not be detected.

Know-How

This compact sensor can detect objects in a limited and narrow space.

Benefit / Efficiency

The equipment can be smaller.

Use Products

E3T Ultracompact, Ultrathin Photoelectric Sensor with Built-in Amplifier E3T

The Improved E3T Series with Easier, Smoother Mounting and Installation