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EE-SPY801 / 802

Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Sensors

Appearance Sensing
method
Sensing
distance
Output configuration Cable length Model
Reflective type 0 to 3 mm
(Infrared light)
Turns ON when wafer carrier is
present.
2 m EE-SPY801 2M
EE-SPY802 2M

Accessories (Order Separately)

Item Model
Pedestal EE9-C01
EE9-C02

Note: There are no sensor functions provided.