... mode High-speed mode Super-high- speed mode Retro-reflective Film detection M3 E32-C31 2M +E39-F3R +E39-RP37 250 200 --- Square --- E32-R16 5M 150 to 1,500 Threaded M6 E32-R21 2M 10 to 250 H...

https://www.ia.omron.com/data_pdf/cat/e3x-zv_mzv_e616-e1_1_4_csm1121952.pdf