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Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Data Sheet (261KB)

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Primary Contents

Sensors

EE-SPY801

EE-SPY802

EE-SPY801_Dim

EE-SPY802_Dim

Accessories (Optional)

Pedestal
EE9-C01

Pedestal
EE9-C02

EE9-C01_Dim

EE9-C02_Dim

Caution: All units are in millimeters unless otherwise indicated.

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Sensors

Photomicro Sensors
- Slot-type
- Through-beam
- Slot-type / Reflective
- Limited-reflective
- Diffuse-reflective
- Retro-reflective
- Optical Fiber
- For Special Applications
  - EE-SPX613 / 613-3
  - EE-SPY801 / 802
  - EE-SA801

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