Page top

EE-SPY801 / 802

Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

The mounting position is set with a pedestal.

The contact surface with the wafer carrier uses a special chemical-resistant fluororesin.

The unique optical system enables stable detection of almost all wafer-carriers.

Light modulation effectively reduces external light interference.

Utilizes talc-free clean cables.