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EE-SPY801 / 802

Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

• The mounting position is set with a pedestal.

• The contact surface with the wafer carrier uses a special chemical-resistant fluororesin.

• The unique optical system enables stable detection of almost all wafer-carriers.

• Light modulation effectively reduces external light interference.

• Utilizes talc-free clean cables.