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Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Data Sheet (261KB)

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The mounting position is set with a pedestal.

The contact surface with the wafer carrier uses a special chemical-resistant fluoro-resin.

The unique optical system enables stable detection of almost all wafer-carriers.

Light modulation effectively reduces external light interference.

Utilizes talc-free clean cables.

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Sensors

Photomicro Sensors
- Slot-type
- Through-beam
- Slot-type / Reflective
- Limited-reflective
- Diffuse-reflective
- Retro-reflective
- Optical Fiber
- For Special Applications
  - EE-SPX613 / 613-3
  - EE-SPY801 / 802
  - EE-SA801

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