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Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Data Sheet (368KB)

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Sensors

Appearance	Sensing method	Sensing distance	Output configuration	Cable length	Model
	Reflective type	0 to 3 mm (Infrared light)	Turns ON when wafer carrier is present.	2 m	EE-SPY801 2M
	Reflective type	0 to 3 mm (Infrared light)	Turns ON when wafer carrier is present.	2 m	EE-SPY802 2M

Accessories (Order Separately)

Item	Model
Pedestal	EE9-C01
Pedestal	EE9-C02

Note:There are no sensor functions provided.

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Sensors

Photomicro Sensors
- Slot-type
- Through-beam
- Slot-type / Reflective
- Limited-reflective
- Diffuse-reflective
- Retro-reflective
- Optical Fiber
- For Special Applications
  - EE-SPX613
  - EE-SPY801 / 802
  - EE-SA801

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