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ZS Series

Smart Sensor 2D Measurement Type

ZS Series

A Lineup for Ultra-high-precision Displacement Measurements That Take Smart Sensors into a New Realm

Smart Sensor

ZS-HL series Sensor Heads

Optical
system
Sensing
distance
Beam shape Beam diameter Resolution
(see note)
Cable
length
Model
Regular
Reflective
Models
25±2 mm Line beam 2.2 mm × 45 μm 0.6 μm 2m ZS-HLDS2VT 2M
0.5m ZS-HLDS2VT 0.5M
Diffuse
Reflective
Models
50±5 mm Line beam 1.0 mm × 0 μm 0.25 μm 2m ZS-HLDS5T 2M
0.5m ZS-HLDS5T 0.5M
100±20 mm Line beam 3.5 mm × 60 μm 1 μm 2m ZS-HLDS10 2M
0.5m ZS-HLDS10 0.5M
600±350 mm Line beam 16 mm × 0.3 mm 8 μm 2m ZS-HLDS60 2M
0.5m ZS-HLDS60 0.5M
1500±500 mm Line beam 40 mm × 1.5 mm 500 μm 2m ZS-HLDS150 2M
0.5m ZS-HLDS150 0.5M

Note: Refer to the table of ratings and specifications for details.

ZS-HL series Sensor Heads (For Nozzle Gaps)

Optical
system
Sensing
distance
Beam shape Beam diameter Resolution
(see note)
Cable
length
Model
Regular
Reflective
Models
10±0.5 mm Line beam 900 × 25 μm 0.25 μm 2m ZS-LD10GT 2M
0.5m ZS-LD10GT 0.5M
15±0.75 mm Line beam 900 × 25 μm 0.25 μm 2m ZS-LD15GT 2M
0.5m ZS-LD15GT 0.5M

Note: Refer to the table of ratings and specifications for details.

ZS-L series Sensor Heads

Optical
system
Sensing
distance
Beam shape Beam diameter Resolution
(see note)
Cable
length
Model
Regular
Reflective
Models
20±1 mm Line beam 900 × 25 μm 0.25 μm 2m ZS-LD20T 2M
0.5m ZS-LD20T 0.5M
Spot beam 25 μm dia. 0.25 μm 2m ZS-LD20ST 2M
0.5m ZS-LD20ST 0.5M
40±2.5 mm Line beam 2000 × 35 μm 0.4 μm 2m ZS-LD40T 2M
0.5m ZS-LD40T 0.5M
Diffuse
Reflective
Models
50±5 mm Line beam 900 × 60 μm 0.8 μm 2m ZS-LD50 2M
0.5m ZS-LD50 0.5M
Spot beam 50 μm dia. 0.8 μm 2m ZS-LD50S 2M
0.5m ZS-LD50S 0.5M
80±15 mm Line beam 900 × 60 μm 2 μm 2m ZS-LD80 2M
0.5m ZS-LD80 0.5M
130±15 mm Line beam 600 × 70 μm 3 μm 2m ZS-LD130 2M
0.5m ZS-LD130 0.5M
200±50 mm Line beam 900 × 100 μm 5 μm 2m ZS-LD200 2M
0.5m ZS-LD200 0.5M
350±135 mm Spot beam 240 μm dia. 20 μm 2m ZS-LD350S 2M
0.5m ZS-LD350S 0.5M

Note: No. of samples to average: 128 when set to High-precision Mode.

ZS-HL series Sensor Controllers

Shape Supply voltage Control outputs Model
3175_lu_4_1 24 VDC NPN outputs ZS-HLDC11-N
PNP outputs ZS-HLDC41-N

Accessories (Sold Separately)

Panel Mount Adapter

Shape Model
3175_lu_5_1 ZS-XPM1 For 1st Controller
3175_lu_5_2 ZS-XPM2 For expansion
(from 2nd Controller on)

RS-232C Cables

Connected to Model Qty
Personal computer (2 m) ZS-XRS3 1
PLC/PT (2 m) ZS-XPT3

Extension Cables for Sensor Heads

Cable length Model Qty
1 m ZS-XC1A 1
4 m ZS-XC4A
5 m ZS-XC5B (*1,*2)
8 m ZS-XC8A
10 m ZS-XC10B (*1)

*1 Up to two ZS-XC[]B Cables can be connected. (22 m max.)
*2 The ZS-XC3BR (3 m) and ZS-XC5BR (5 m) Robot Cables are also available.

Long Extension Cables for Sensor Heads (Used with a Digital Equalizer for ZS-HL Series)

Name Model Qty
Digital Equalizer (Relay) ZS-XEQ 1
Extension Cable (long distance, flexible 15 m cable) ZS-XC15CR 1
Extension Cable (long distance, flexible 25 m cable) ZS-XC25CR 1
Digital Equalizer Connection Cable (0.2 m) ZS-XC02D 1

Logging Software

Name Model
SmartMonitor Professional ZS-SW11V3E

Realtime Parallel Output Unit (for ZS-HL Series)

Shape Control outputs Model
3175_lu_10_1 NPN outputs ZG-RPD11-N
PNP outputs ZG-RPD41-N

Memory Cards

Model Capacity
HMC-EF283 256 MB
HMC-EF583 512 MB