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ZS Series

Smart Sensor 2D Measurement Type

ZS Series

A Lineup for Ultra-high-precision Displacement Measurements That Take Smart Sensors into a New Realm

Sensor Controllers

Model ZS-HLDC11-N ZS-HLDC41-N
No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted Sensors 1 per Sensor Controller
External
interface
Connection method Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
Serial
I/O
USB 2.0 1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C 1 port, 115,200 bps max.
Output Judgment
output
HIGH/PASS/LOW 3 outputs
NPN open collector, 30 VDC, 50 mA
max., residual voltage 1.2 V max.
HIGH/PASS/LOW: 3 outputs
PNP open collector, 50 mA max.,
residual voltage 1.2 V max.
Linear output Selectable from 2 types of output, voltage or current (selected by slide switch on
bottom).
• Voltage output: -10 to 10 V, output impedance: 40
• Current output: 4 to 20 mA, maximum load resistance: 300
Inputs Laser OFF,
ZERO reset
timing, RESET
ON: Short-circuited with 0 V terminal
or 1.5 V or less
OFF: Open (leakage current: 0.1 mA
max.)
ON: Short-circuited to supply voltage
or within 1.5 V of supply voltage.
OFF: Open (leakage current: 0.1 mA
max.)
Functions Display: Measured value, threshold value, voltage/current, received light amount,
and resolution/terminal block output
Sensing: Mode, gain, measurement object, head installation
Measurement point: Average, peak, bottom, thickness, step, and calculations
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-
measurement, and bank (switching and clear)
System: Save, initialization, measurement information display, communications
settings, key lock, language, and data load
Task: Single task or multitask (up to 4)
Status indicators HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and
ENABLE (green)
Segment display Main digital 8-segment red LED, 6 digits
Sub-digital 8-segment green LEDs, 6 digits
LCD 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel
matrix
Setting Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and
function keys (1 to 4)
Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and
RUN)
Power supply voltage 21.6 V to 26.4 VDC (including ripple)
Current consumption 0.5 A max. (when Sensor Head is connected)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP20 (IEC60529)
Materials Case: Polycarbonate (PC)
Cable length 2 m
Weight Approx. 280 g (excluding packing materials and accessories)
Accessories Ferrite core (1), instruction sheet

ZS-HL series Sensor Heads

Model ZS-HLDS2VT ZS-HLDS5T
Optical system Regular reflection Diffuse reflection Regular reflection
Measuring center
distance
25 mm 50 mm 44 mm
Measuring range ±2 mm ±5 mm ±4 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam
Beam diameter *1 2.2mm × 45 μm 1.0mm × 30 μm
Linearity *2 ±0.2% F.S. ±0.1% F.S.
Resolution *3 0.6 μm
(No. of samples to average: 128)
0.25 μm
(No. of samples to average: 512)
Temperature
characteristic *4
±0.1% F.S./°C 0.01% F.S./°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient
temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
IP67 Cable length 0.5 m: IP66,
cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 2 m 0.5 m, 2 m
Weight Approx. 350 g Approx. 600 g
Accessories ZS-HLDS2VT:
Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
ZS-HLDS5T/-HLDS10/-HLDS60/-HLDS150:
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet

Model ZS-HLDS10 ZS-HLDS60 ZS-HLDS150
Optical system Diffuse
reflection
Regular
reflection
Diffuse reflection Diffuse reflection
Measuring center
distance
100 mm 94 mm 600 mm 1,500 mm
Measuring range ±20 mm ±16 mm ±350 mm ±500 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam
Beam diameter *1 3.5mm × 60 μm 16 × 0.3 mm
(at 500 mm)
40 × 1.5 mm
(at 1,500 mm)
Linearity *2 ±0.1% F.S. ±0.07% F.S.
(250 to 750 mm)
±0.1% F.S.
(750 to 950 mm)
±0.2% F.S.
Resolution *3 1 μm
(No. of samples to average: 64)
μm (No. of samples to
average: 64 at 250 mm),
40 μm (No. of samples to
average: 64 at 600 mm)
500 μm
(No. of samples to
average: 64)
Temperature
characteristic *4
0.01% F.S./°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface:
3000 lx or less (incandescent light)
Illumination on received
light surface:
1000 lx or less
(incandescent light)
Illumination on received
light surface:
500 lx or less
(incandescent light)
Ambient
temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66,
cable length 2 m: IP67
IP66 *6
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 600 g Approx. 800 g
Accessories ZS-HLDS2VT:
Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
ZS-HLDS5T/-HLDS10/-HLDS60/-HLDS150:
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet

*1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
       The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the
       main beam.

*2. This is the error in the measured value with respect to an ideal straight line.
       Linearity may change according to the workpiece.
       The following options are available.

Model Diffuse reflection Mirror reflection
ZS-HLDS2VT --- Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic ---

*3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance
       in high-precision mode when the number of samples to average is set to within the graph.
       The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.

Model Diffuse reflection Mirror reflection
ZS-HLDS2VT --- Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic ---

*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
  (typical example)
*5 Protection structure of connector area is IP40.
*6 Ask your OMRON representative about Sensor Heads with IP67 protection.

ZS-L-series Sensor Heads

Model ZS-LD20T ZS-LD20ST ZS-LD40T ZS-LD10GT ZS-LD15GT
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Diffuse
reflection
Diffuse
reflection
Regular reflection
Measuring center
distance
20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm
Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter *1 900 × 25 μm 25 μm dia. 2,000 × 35 μm Approx. 25 × 900 μm
Linearity *2 ±0.1% F.S.
Resolution *3 0.25 μm 0.25 μm 0.4 μm 0.25 μm 0.25 μm
Temperature
characteristic *4
0.04% F.S./°C 0.04% F.S./°C 0.02% F.S./°C 0.04% F.S./°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection
*5
Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2),
insure locks (2), instruction sheet
Laser safety labels
(1 each for JIS/EN),
ferrite cores (2),
insure locks (2)

*1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
*2 This is the error in the measured value with respect to an ideal straight line.
The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
Linearity may change according to the workpiece.
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. (typical example)
*5 Protection structure of connector area is IP40.

ZS-L series Sensor Heads

Model ZS-LD50 ZS-LD50S ZS-LD80
Optical system Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular 
reflection
Measuring center
distance
50 mm 47 mm 50 mm 47 mm 80 mm 78 mm
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter *1 900 × 60 μm 50 μm dia. 900 × 60 μm
Linearity *2 ±0.1% FS
Resolution *3 0.8 μm 0.8 μm 2 μm
Temperature
characteristic *4
0.02% FS/°C 0.02% FS/°C 0.01% FS/°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2),
instruction sheet

Model ZS-LD130 ZS-LD200 ZS-LD350S
Optical system Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection
Measuring center
distance
130 mm 130 mm 200 mm 200 mm 350 mm
Measuring range ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Line beam Spot beam
Beam diameter *1 600 × 70 μm 900 × 100 μm 240 μm dia.
Linearity *2 ±0.1% FS ±0.25% FS ±0.1% FS ±0.25% FS ±0.1% FS
Resolution *3 3 μm 5 μm 20 μm
Temperature
characteristic *4
0.02% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface:
2000 lx or less (incandescent light)
Illumination on received light surface:
3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2),
instruction sheet

*1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
*2 This is the error in the measured value with respect to an ideal straight line.
The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
Linearity may change according to the workpiece.
*3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
*4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
*5 Protection structure of connector area is IP40.