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ZS Series

Smart Sensors 2D CMOS Laser Type

ZS Series

High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.

ZS-HL/L-series Sensor Controllers

Model ZS-HLDC11/LDC11 ZS-HLDC41/LDC41
No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted Sensors 1 per Sensor Controller
External
interface
Connection method Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
Serial
I/O
USB 2.0 1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C 1 port, 115,200 bps max.
Output Judgment
output
HIGH/PASS/LOW 3 outputs
NPN open collector, 30 VDC, 50 mA
max., residual voltage 1.2 V max.
HIGH/PASS/LOW: 3 outputs
PNP open collector, 50 mA max.,
residual voltage 1.2 V max.
Linear
output
Selectable from 2 types of output, voltage or current (selected by slide switch
on bottom).
• Voltage output: -10 to 10 V, output impedance: 40 Ω
• Current output: 4 to 20 mA, maximum load resistance: 300 Ω
Inputs Laser OFF,
ZERO reset
timing, RESET
ON: Short-circuited to supply voltage
or within 1.5 V of supply voltage.
OFF: Open (leakage current: 0.1 mA
max.)
Functions Display: Measured value, threshold value, voltage/current, received light amount,
and resolution/terminal block output *2
Sensing: Mode, gain, measurement object, head installation
Measurement point *1: Average, peak, bottom, thickness, step, and calculations
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-
measurement, and bank (switching and clear) *2
System: Save, initialization, measurement information display, communications
settings, key lock, language, and data load
Task: ZS-HLDC[]1: Single task or multitask (up to 4), ZS-LDC[]1: Single task
Status indicators HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and
ENABLE (green)
Segment display Main digital 8-segment red LED, 6 digits
Sub-digital 8-segment green LEDs, 6 digits
LCD 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8
pixel matrix
Setting inputs Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and
function keys (1 to 4)
Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and
RUN)
Power supply voltage 21.6 V to 26.4 VDC (including ripple)
Current consumption 0.5 A max. (when Sensor Head is connected)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP20 (IEC60529)
Materials Case: Polycarbonate (PC)
Cable length 2 m
Weight Approx. 280 g (excluding packing materials and accessories)
Accessories Ferrite core (1), instruction sheet
*1. Can be used with ZS-HLDC[]1 when Multitask Mode selected.
*2. Terminal block output is a function of the ZS-HLDC[]1.

ZS-HL-series Sensor Heads

Model ZS-HLDS2T ZS-HLDS2VT ZS-HLDS5T
Applicable
Controllers
ZS-HLDC series
Optical system Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection
Measuring center
distance
20 mm 5.2 mm 25 mm 50 mm 44 mm
Measuring range ±1 mm ±1 mm ±2 mm ±5 mm ±4 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam
Beam diameter *1 1.0 mm × 20 μm 2.2 mm × 45 μm 1.0 mm × 30 μm 3.5 mm × 60 μm
Linearity *2 ±0.05%F.S. ±0.2%F.S. ±0.1%F.S.
Resolution *3 0.25 μm
(No. of samples to average: 256)
0.6 μm (No. of
samples to
average: 128)
0.25 μm (No. of
samples to
average: 512)
1 μm (No. of
samples to
average: 64)
Temperature
characteristic *4
0.01%F.S./°C 0.1%F.S./°C 0.01%F.S./°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 μs (High-precision Mode),
4.4 μs (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient
temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
IP64 IP67 Cable length 0.5 m: IP66,
cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m 2 m 0.5 m, 2 m
Weight Approx. 350 g Approx. 600 g
Accessories Laser labels
(1 each for JIS/EN, 3 for FDA),
ferrite cores (4), insure locks (2),
instruction sheet
Laser labels
(1 each for JIS/EN),
ferrite cores (2),
insure locks (2),
instruction sheet
Laser labels
(1 each for JIS/EN, 3 for FDA),
ferrite cores (4), insure locks (2),
instruction sheet

Model ZS-HLDS10 ZS-HLDS60 ZS-HLDS150
Applicable
Controllers
ZS-HLDC series
Optical system Diffuse reflection Regular reflection Diffuse reflection Diffuse reflection
Measuring center
distance
100 mm 94 mm 600 mm 1500 mm
Measuring range ±20 mm ±16 mm ±350 mm ±500 mm
Light source Visible semiconductor laser
(wavelength: 650 nm, 1 mW max.,
JIS Class 2)
Visible semiconductor laser (wavelength: 658 nm,
1 mW max., JIS Class 2)
Beam shape Line beam
Beam diameter *1 3.5 mm × 60 μm 16 × 0.3 mm (at 500 mm) 40 × 1.5 mm
(at 1,500 mm)
Linearity *2 ±0.1%F.S. ±0.07%F.S. (250 to 750
mm), ±0.1%F.S. (750 to
950 mm)
±0.2%F.S.
Resolution *3 1 μm (No. of samples to average: 64) 8 μm (No. of samples to
average: 64 at 250 mm),
40 μm (No. of samples to
average: 64 at 600 mm)
500 μm (No. of samples
to average: 64)
Temperature
characteristic *4
0.01%F.S./°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 μs (High-precision Mode),
4.4 μs (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface:
3000 lx or less (incandescent light)
Illumination on received
light surface: 1000 lx or
less (incandescent light)
Illumination on received
light surface: 500 lx or
less (incandescent light)
Ambient
temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66,
cable length 2 m: IP67
IP66 *6
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 600 g Approx. 800 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet

*1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The
       beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the
       main beam.
*2. This is the error in the measured value with respect to an ideal straight line.
       Linearity may change according to the workpiece.
       The following options are available.
Model Diffuse reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS2VT --- Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic ---

*3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance
       in high-precision mode when the number of samples to average is set to within the graph.
       The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.
Model Diffuse reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS2VT --- Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic ---

*4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an
    aluminum jig. (typical example)
∗5. Protection structure of connector area is IP40.
∗6. Ask your OMRON representative about Sensor Heads with IP67 protection.

ZS-L-series Sensor Heads

Model ZS-LD20T ZS-LD20ST ZS-LD40T ZS-
LD10GT
ZS-
LD15GT
Applicable Controllers ZS-HLDC/LDC series
Optical system Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular reflection
Measuring center
distance
20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm
Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter *1 900 mm x 25 μm 20 μm dia. 2000 x 35 μm Approx 25 x 900 μm
Linearity *2 ±0.1%FS
Resolution *3 0.25 μm 0.25 μm 0.4 μm 0.25 μm 0.25 μm
Temperature
characteristic *4
0.04%FS/°C 0.04%FS/°C 0.02%FS/°C 0.04%FS/°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 μs (High-precision Mode),
4.4 μs (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 400 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2),
insure locks (2), instruction sheet
Laser safety labels
(1 each for JIS/EN),
ferrite cores (2),
insure locks (2)

∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
    The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light
    from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line.
    The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
    Linearity may change according to the workpiece.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center
    distance in high-precision mode when the number of samples to average is set to 128 and the measuring
    mode is set to the high-resolution mode.
    The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an
    aluminum jig. (typical example)
∗5. Protection structure of connector area is IP40.

ZS-L-series Sensor Heads

Model ZS-LD50 ZS-LD50S ZS-LD80
Applicable Controllers ZS-HLDC/LDC series
Optical system Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular 
reflection
Measuring center
distance
50 mm 47 mm 50 mm 47 mm 80 mm 78 mm
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter *1 900 × 60 μm 50 μm dia. 900 × 60 μm
Linearity *2 ±0.1% FS
Resolution *3 0.8 μm 0.8 μm 2 μm
Temperature
characteristic *4
0.02% FS/°C 0.02% FS/°C 0.01% FS/°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2),
instruction sheet

Model ZS-LD130 ZS-LD200 ZS-LD350S
Applicable Controllers ZS-HLDC/LDC series
Optical system Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection
Measuring center
distance
130 mm 130 mm 200 mm 200 mm 350 mm
Measuring range ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Line beam Spot beam
Beam diameter *1 600 × 70 μm 900 × 100 μm 240 μm dia.
Linearity *2 ±0.1% FS ±0.25% FS ±0.1% FS ±0.25% FS ±0.1% FS
Resolution *3 3 μm 5 μm 20 μm
Temperature
characteristic *4
0.02% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR
indicator
Lights near the measuring center distance, and closer than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lights near the measuring center distance, and farther than the measuring center distance
inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface:
2000 lx or less (incandescent light)
Illumination on received light surface:
3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection *5
Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2),
instruction sheet

∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
    The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light
    from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line.
    The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
    Linearity may change according to the workpiece.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center
    distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode
    is set to the high-resolution mode.
     The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an
    aluminum jig.
∗5. Protection structure of connector area is IP40.

ZS-MDC[]1 Multi-Controllers

Basic specifications are the same as those for the ZS-LDC[]1 Sensor Controllers. The following points, however, are different.
1. Sensor Heads cannot be connected.
2. Control Link Units are required to connect up to 9 Controllers.
     Control Link Units are required to connect Controllers.
3. Processing functions between Controllers: Arithmetic functions

Controller Link Units

Connection Using the ZS-XCN

ZS Series Specifications 13

ZS-DSU[]1 Data Storage Unit

Model ZS-DSU11 ZS-DSU41
Number of mounted Sensor
Heads
Cannot be connected
Number of connectable
Controllers
10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.) *1
Connectable Controllers ZS-HLDC[][], ZS-LDC[][], ZS-MDC[][]
External
interface
Connection
method
Serial I/O: connector, Other: pre-wired (standard cable length: 2 m)
Serial
I/O
USB 2.0 1 port, Full Speed (12 Mbps max.), MINI-B
RS-232C 1 port, 115,200 bps max.
Output 3 outputs: HIGH, PASS, and LOW; NPN
open-collector, 30 VDC, 50 mA max.,
residual voltage: 1.2 V max.
3 outputs: HIGH, PASS, and LOW; PNP
open-collector, 50 mA max., residual
voltage: 1.2 V max.
Inputs ON: Short-circuited with 0 V terminal or
1.5 V or less; OFF: Open (leakage current:
0.1 mA max.)
ON: Short-circuited to supply voltage or
within 1.5 V of supply voltage; OFF: Open
(leakage current: 0.1 mA max.)
Data resolution 32 bits
Functions Logging trigger
functions
Start and stop triggers can be set separately; external triggers, data triggers (self-
triggers), and time triggers
Other functions External banks, alarm outputs, saved data format customization, and clock
Status indicators OUT (orange), PWR (green), ACCESS (orange), and ERR (red)
Segment display 8-segment green LEDs, 6 digits
LCD 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 × 8 pixel
matrix
Setting
inputs
Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage 21.6 V to 26.4 VDC (including ripple)
Current consumption 0.5 A max.
Ambient temperature Operating: 0 to 50°C, Storage: 0 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection IP20 (IEC60529)
Materials Case: Polycarbonate (PC)
Weight Approx. 280 g (excluding packing materials and accessories)
Accessories Ferrite core (1), instruction sheet for Data Storage Unit: CSV File Converter for Data
Storage Unit/Smart Analyzer Macro Edition